{"id":435,"date":"2023-03-23T13:06:14","date_gmt":"2023-03-23T17:06:14","guid":{"rendered":"https:\/\/gritcms.smca.ucf.edu\/chanda\/?page_id=435"},"modified":"2023-03-30T11:00:42","modified_gmt":"2023-03-30T15:00:42","slug":"creol","status":"publish","type":"page","link":"https:\/\/nanoscience.ucf.edu\/chanda\/resources\/creol\/","title":{"rendered":"CREOL"},"content":{"rendered":"\n<div class=\"wp-block-columns is-layout-flex wp-container-core-columns-is-layout-9d6595d7 wp-block-columns-is-layout-flex\">\n<div class=\"wp-block-column is-layout-flow wp-block-column-is-layout-flow\" style=\"flex-basis:33.33%\">\n<div class=\"wp-block-group card card-block p-3 p-lg-4 is-vertical is-layout-flex wp-container-core-group-is-layout-8cf370e7 wp-block-group-is-layout-flex\">\n<h3 class=\"h5 heading-underline mb-4 mt-1 wp-block-heading\">RESEARCH FACILITIES<\/h3>\n\n\n\n<ul class=\"list-unstyled mb-0 wp-block-list\">\n<li class=\"mb-2\"><a href=\"https:\/\/nanoscience.ucf.edu\/chanda\/resources\/\" data-type=\"page\" data-id=\"68\">Nano-Optics Group<\/a><\/li>\n\n\n\n<li class=\"mb-2\"><a href=\"https:\/\/nanoscience.ucf.edu\/chanda\/resources\/creol\/\" data-type=\"page\" data-id=\"435\">CREOL<\/a><\/li>\n\n\n\n<li class=\"mb-2\"><a href=\"https:\/\/nanoscience.ucf.edu\/chanda\/resources\/advanced-microfabrication-facility\/\" data-type=\"page\" data-id=\"437\">Advanced Microfabrication Facility<\/a><\/li>\n\n\n\n<li class=\"mb-2\"><a href=\"https:\/\/nanoscience.ucf.edu\/chanda\/resources\/materials-characterization-facility\/\" data-type=\"page\" data-id=\"439\">Materials Characterization Facility<\/a><\/li>\n\n\n\n<li class=\"mb-2\"><a href=\"https:\/\/nanoscience.ucf.edu\/chanda\/resources\/nanoscience-technology-center\/\" data-type=\"page\" data-id=\"441\">NanoScience Technology Center<\/a><\/li>\n\n\n\n<li><a href=\"https:\/\/nanoscience.ucf.edu\/chanda\/resources\/physics-department\/\" data-type=\"page\" data-id=\"443\">Physics Department<\/a><\/li>\n<\/ul>\n<\/div>\n<\/div>\n\n\n\n<div class=\"wp-block-column is-layout-flow wp-block-column-is-layout-flow\" style=\"flex-basis:66.66%\">\n<h2 class=\"wp-block-heading\">CREOL<\/h2>\n\n\n\n<p><strong>Nanophotonics Systems Fabrication Facility<\/strong><\/p>\n\n\n\n<p>A 3,000 ft2 facility containing Class 100 and Class 1000 clean rooms. Used for the fabrication and study of nanostructured materials and nanophotonic integrated circuits.<\/p>\n\n\n\n<p>The CREOL Nano-Fabrication facility is open to internal and external users. The facility contains a range of nanofabrication tools and related instrumentation, including an electron-beam lithography system (Leica EPBG 5000+), and various etching and deposition tools.<\/p>\n\n\n\n<div class=\"wp-block-columns is-layout-flex wp-container-core-columns-is-layout-9d6595d7 wp-block-columns-is-layout-flex\">\n<div class=\"wp-block-column is-layout-flow wp-block-column-is-layout-flow\" style=\"flex-basis:66.66%\">\n<h3 class=\"wp-block-heading\">Leica EBPG5000+<\/h3>\n\n\n\n<p>Electron beam lithography system is capable of running at 20, 50 and 100 kV, with a minimum spot size of less than 10nm. The main exposure field size may range between 160um X 160um and 1mm X 1mm with a stitching value of less than 50nm. Electron-beam lithography can be performed on a variety of substrate sizes, including five inch masks, three and four inch wafers, and small pieces. A multi-substrate load lock is used to aid in the sequential processing of multiple jobs.<\/p>\n<\/div>\n\n\n\n<div class=\"wp-block-column is-layout-flow wp-block-column-is-layout-flow\" style=\"flex-basis:33.33%\">\n<figure class=\"wp-block-image size-full\"><a href=\"https:\/\/nanoscience.ucf.edu\/wp-content\/uploads\/sites\/15\/2023\/03\/leica.jpg\"><img loading=\"lazy\" decoding=\"async\" width=\"650\" height=\"475\" src=\"https:\/\/nanoscience.ucf.edu\/wp-content\/uploads\/sites\/15\/2023\/03\/leica.jpg\" alt=\"\" class=\"wp-image-459\" srcset=\"https:\/\/nanoscience.ucf.edu\/chanda\/wp-content\/uploads\/sites\/15\/2023\/03\/leica.jpg 650w, https:\/\/nanoscience.ucf.edu\/chanda\/wp-content\/uploads\/sites\/15\/2023\/03\/leica-300x219.jpg 300w\" sizes=\"auto, (max-width: 650px) 100vw, 650px\" \/><\/a><\/figure>\n<\/div>\n<\/div>\n\n\n\n<h3 class=\"wp-block-heading\">Woollam M2000 Mapping Spectroscopic Ellipsometer (managed by&nbsp;<a href=\"http:\/\/kik.creol.ucf.edu\/ellipsometer.html\" target=\"_blank\" rel=\"noreferrer noopener\">Kik group)<\/a><br><a href=\"http:\/\/kik.creol.ucf.edu\/ellipsometer.html\"><\/a><a href=\"https:\/\/www.nanoscience.ucf.edu\/chanda\/images\/equipment\/ellipsometer.jpg\"><\/a><\/h3>\n\n\n\n<div class=\"wp-block-columns is-layout-flex wp-container-core-columns-is-layout-9d6595d7 wp-block-columns-is-layout-flex\">\n<div class=\"wp-block-column is-layout-flow wp-block-column-is-layout-flow\" style=\"flex-basis:33.33%\">\n<figure class=\"wp-block-image size-full\"><a href=\"https:\/\/nanoscience.ucf.edu\/wp-content\/uploads\/sites\/15\/2023\/03\/ellipsometer.jpg\"><img loading=\"lazy\" decoding=\"async\" width=\"814\" height=\"300\" src=\"https:\/\/nanoscience.ucf.edu\/wp-content\/uploads\/sites\/15\/2023\/03\/ellipsometer.jpg\" alt=\"\" class=\"wp-image-458\" srcset=\"https:\/\/nanoscience.ucf.edu\/chanda\/wp-content\/uploads\/sites\/15\/2023\/03\/ellipsometer.jpg 814w, https:\/\/nanoscience.ucf.edu\/chanda\/wp-content\/uploads\/sites\/15\/2023\/03\/ellipsometer-300x111.jpg 300w, https:\/\/nanoscience.ucf.edu\/chanda\/wp-content\/uploads\/sites\/15\/2023\/03\/ellipsometer-768x283.jpg 768w\" sizes=\"auto, (max-width: 814px) 100vw, 814px\" \/><\/a><\/figure>\n<\/div>\n\n\n\n<div class=\"wp-block-column is-layout-flow wp-block-column-is-layout-flow\" style=\"flex-basis:66.66%\">\n<p>The M2000 High-Speed Scanning Variable Angle Spectroscopic Ellipsometer enables the mapping of layer thickness as well as linear optical properties (refractive index, absorption coefficient, depolarization factors, anisotropy) of single layer or multilayer films at wavelengths between 0.24\u03bcm &#8211; 1.7\u03bcm with a spectral resolution of 3-6nm. The system supports mapping of up to 6\u201d diameter wafers. A complete UV-NIR spectrum can be acquired in 5 seconds with a 0.1 mm spatial resolution.<\/p>\n<\/div>\n<\/div>\n\n\n\n<div class=\"wp-block-columns is-layout-flex wp-container-core-columns-is-layout-9d6595d7 wp-block-columns-is-layout-flex\">\n<div class=\"wp-block-column is-layout-flow wp-block-column-is-layout-flow\" style=\"flex-basis:66.66%\">\n<h3 class=\"wp-block-heading\">Optoelectronic Fabrication Cleanroom<\/h3>\n\n\n\n<p>The 800 sq. ft. cleanroom is a multi-user facility consisting of class 100 and class 10,000 cleanrooms, and is used in the development of optoelectronic semiconductor devices. The facility equipment includes a Suss MJB-3 aligner, a Plasma-Therm 790 RIE\/PECVD, an Edwards thermal evaporator, along with a bonder, a scriber and microscope.<\/p>\n<\/div>\n\n\n\n<div class=\"wp-block-column is-layout-flow wp-block-column-is-layout-flow\" style=\"flex-basis:33.33%\">\n<figure class=\"wp-block-image size-full\"><a href=\"https:\/\/nanoscience.ucf.edu\/wp-content\/uploads\/sites\/15\/2023\/03\/cleanroom.jpg\"><img loading=\"lazy\" decoding=\"async\" width=\"525\" height=\"385\" src=\"https:\/\/nanoscience.ucf.edu\/wp-content\/uploads\/sites\/15\/2023\/03\/cleanroom.jpg\" alt=\"\" class=\"wp-image-457\" srcset=\"https:\/\/nanoscience.ucf.edu\/chanda\/wp-content\/uploads\/sites\/15\/2023\/03\/cleanroom.jpg 525w, https:\/\/nanoscience.ucf.edu\/chanda\/wp-content\/uploads\/sites\/15\/2023\/03\/cleanroom-300x220.jpg 300w\" sizes=\"auto, (max-width: 525px) 100vw, 525px\" \/><\/a><\/figure>\n<\/div>\n<\/div>\n<\/div>\n<\/div>\n","protected":false},"excerpt":{"rendered":"CREOL Nanophotonics Systems Fabrication Facility A 3,000 ft2 facility containing Class 100 and Class 1000 clean rooms. Used for the fabrication and study of nanostructured materials and nanophotonic integrated circuits. The CREOL Nano-Fabrication facility is open to internal and external users. The facility contains a range of nanofabrication tools and related instrumentation, including an electron-beam&hellip;","protected":false},"author":69,"featured_media":0,"parent":68,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":{"_acf_changed":false,"footnotes":""},"class_list":["post-435","page","type-page","status-publish","hentry"],"yoast_head":"<!-- This site is optimized with the Yoast SEO Premium plugin v23.0 (Yoast SEO v27.1.1) - https:\/\/yoast.com\/product\/yoast-seo-premium-wordpress\/ -->\n<title>CREOL - Nano-Optics Group<\/title>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/nanoscience.ucf.edu\/chanda\/resources\/creol\/\" \/>\n<meta property=\"og:locale\" content=\"en_US\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"CREOL - Nano-Optics Group\" \/>\n<meta property=\"og:description\" content=\"CREOL Nanophotonics Systems Fabrication Facility A 3,000 ft2 facility containing Class 100 and Class 1000 clean rooms. Used for the fabrication and study of nanostructured materials and nanophotonic integrated circuits. The CREOL Nano-Fabrication facility is open to internal and external users. The facility contains a range of nanofabrication tools and related instrumentation, including an electron-beam&hellip;\" \/>\n<meta property=\"og:url\" content=\"https:\/\/nanoscience.ucf.edu\/chanda\/resources\/creol\/\" \/>\n<meta property=\"og:site_name\" content=\"Nano-Optics Group\" \/>\n<meta property=\"article:modified_time\" content=\"2023-03-30T15:00:42+00:00\" \/>\n<meta property=\"og:image\" content=\"https:\/\/gritcms.smca.ucf.edu\/wp-content\/uploads\/sites\/15\/2023\/03\/leica.jpg\" \/>\n<meta name=\"twitter:card\" content=\"summary_large_image\" \/>\n<meta name=\"twitter:label1\" content=\"Est. reading time\" \/>\n\t<meta name=\"twitter:data1\" content=\"1 minute\" \/>\n<script type=\"application\/ld+json\" class=\"yoast-schema-graph\">{\"@context\":\"https:\/\/schema.org\",\"@graph\":[{\"@type\":\"WebPage\",\"@id\":\"https:\/\/nanoscience.ucf.edu\/chanda\/resources\/creol\/\",\"url\":\"https:\/\/nanoscience.ucf.edu\/chanda\/resources\/creol\/\",\"name\":\"CREOL - Nano-Optics Group\",\"isPartOf\":{\"@id\":\"https:\/\/nanoscience.ucf.edu\/chanda\/#website\"},\"primaryImageOfPage\":{\"@id\":\"https:\/\/nanoscience.ucf.edu\/chanda\/resources\/creol\/#primaryimage\"},\"image\":{\"@id\":\"https:\/\/nanoscience.ucf.edu\/chanda\/resources\/creol\/#primaryimage\"},\"thumbnailUrl\":\"https:\/\/nanoscience.ucf.edu\/wp-content\/uploads\/sites\/15\/2023\/03\/leica.jpg\",\"datePublished\":\"2023-03-23T17:06:14+00:00\",\"dateModified\":\"2023-03-30T15:00:42+00:00\",\"breadcrumb\":{\"@id\":\"https:\/\/nanoscience.ucf.edu\/chanda\/resources\/creol\/#breadcrumb\"},\"inLanguage\":\"en-US\",\"potentialAction\":[{\"@type\":\"ReadAction\",\"target\":[\"https:\/\/nanoscience.ucf.edu\/chanda\/resources\/creol\/\"]}]},{\"@type\":\"ImageObject\",\"inLanguage\":\"en-US\",\"@id\":\"https:\/\/nanoscience.ucf.edu\/chanda\/resources\/creol\/#primaryimage\",\"url\":\"https:\/\/nanoscience.ucf.edu\/wp-content\/uploads\/sites\/15\/2023\/03\/leica.jpg\",\"contentUrl\":\"https:\/\/nanoscience.ucf.edu\/wp-content\/uploads\/sites\/15\/2023\/03\/leica.jpg\"},{\"@type\":\"BreadcrumbList\",\"@id\":\"https:\/\/nanoscience.ucf.edu\/chanda\/resources\/creol\/#breadcrumb\",\"itemListElement\":[{\"@type\":\"ListItem\",\"position\":1,\"name\":\"Resources\",\"item\":\"https:\/\/nanoscience.ucf.edu\/chanda\/resources\/\"},{\"@type\":\"ListItem\",\"position\":2,\"name\":\"CREOL\"}]},{\"@type\":\"WebSite\",\"@id\":\"https:\/\/nanoscience.ucf.edu\/chanda\/#website\",\"url\":\"https:\/\/nanoscience.ucf.edu\/chanda\/\",\"name\":\"Nano-Optics Group\",\"description\":\"\",\"potentialAction\":[{\"@type\":\"SearchAction\",\"target\":{\"@type\":\"EntryPoint\",\"urlTemplate\":\"https:\/\/nanoscience.ucf.edu\/chanda\/?s={search_term_string}\"},\"query-input\":{\"@type\":\"PropertyValueSpecification\",\"valueRequired\":true,\"valueName\":\"search_term_string\"}}],\"inLanguage\":\"en-US\"}]}<\/script>\n<!-- \/ Yoast SEO Premium plugin. -->","yoast_head_json":{"title":"CREOL - Nano-Optics Group","robots":{"index":"index","follow":"follow","max-snippet":"max-snippet:-1","max-image-preview":"max-image-preview:large","max-video-preview":"max-video-preview:-1"},"canonical":"https:\/\/nanoscience.ucf.edu\/chanda\/resources\/creol\/","og_locale":"en_US","og_type":"article","og_title":"CREOL - Nano-Optics Group","og_description":"CREOL Nanophotonics Systems Fabrication Facility A 3,000 ft2 facility containing Class 100 and Class 1000 clean rooms. 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