{"id":437,"date":"2023-03-23T13:06:41","date_gmt":"2023-03-23T17:06:41","guid":{"rendered":"https:\/\/gritcms.smca.ucf.edu\/chanda\/?page_id=437"},"modified":"2023-03-30T11:00:15","modified_gmt":"2023-03-30T15:00:15","slug":"advanced-microfabrication-facility","status":"publish","type":"page","link":"https:\/\/nanoscience.ucf.edu\/chanda\/resources\/advanced-microfabrication-facility\/","title":{"rendered":"Advanced Microfabrication Facility"},"content":{"rendered":"\n<div class=\"wp-block-columns is-layout-flex wp-container-core-columns-is-layout-9d6595d7 wp-block-columns-is-layout-flex\">\n<div class=\"wp-block-column is-layout-flow wp-block-column-is-layout-flow\" style=\"flex-basis:33.33%\">\n<div class=\"wp-block-group card card-block p-3 p-lg-4 is-vertical is-layout-flex wp-container-core-group-is-layout-8cf370e7 wp-block-group-is-layout-flex\">\n<h3 class=\"h5 heading-underline mb-4 mt-1 wp-block-heading\">RESEARCH FACILITIES<\/h3>\n\n\n\n<ul class=\"list-unstyled mb-0 wp-block-list\">\n<li class=\"mb-2\"><a href=\"https:\/\/nanoscience.ucf.edu\/chanda\/resources\/\" data-type=\"page\" data-id=\"68\">Nano-Optics Group<\/a><\/li>\n\n\n\n<li class=\"mb-2\"><a href=\"https:\/\/nanoscience.ucf.edu\/chanda\/resources\/creol\/\" data-type=\"page\" data-id=\"435\">CREOL<\/a><\/li>\n\n\n\n<li class=\"mb-2\"><a href=\"https:\/\/nanoscience.ucf.edu\/chanda\/resources\/advanced-microfabrication-facility\/\" data-type=\"page\" data-id=\"437\">Advanced Microfabrication Facility<\/a><\/li>\n\n\n\n<li class=\"mb-2\"><a href=\"https:\/\/nanoscience.ucf.edu\/chanda\/resources\/materials-characterization-facility\/\" data-type=\"page\" data-id=\"439\">Materials Characterization Facility<\/a><\/li>\n\n\n\n<li class=\"mb-2\"><a href=\"https:\/\/nanoscience.ucf.edu\/chanda\/resources\/nanoscience-technology-center\/\" data-type=\"page\" data-id=\"441\">NanoScience Technology Center<\/a><\/li>\n\n\n\n<li><a href=\"https:\/\/nanoscience.ucf.edu\/chanda\/resources\/physics-department\/\" data-type=\"page\" data-id=\"443\">Physics Department<\/a><\/li>\n<\/ul>\n<\/div>\n<\/div>\n\n\n\n<div class=\"wp-block-column is-layout-flow wp-block-column-is-layout-flow\" style=\"flex-basis:66.66%\">\n<h2 class=\"wp-block-heading\">Advanced Microfabrication Facility<\/h2>\n\n\n\n<div class=\"wp-block-columns is-layout-flex wp-container-core-columns-is-layout-9d6595d7 wp-block-columns-is-layout-flex\">\n<div class=\"wp-block-column is-layout-flow wp-block-column-is-layout-flow\" style=\"flex-basis:66.66%\">\n<p>The Advanced Microfabrication Facility (AMF) is a multi-user cleanroom facility dedicated to provide university researchers and industrial and government partners the capabilities to perform cutting edge research, and training and education of students in the use of the available equipment for fabrication and testing of microdevices. AMF consists if a 600 sq. ft. class 100 facility and a 2500 sq. ft. class 1000 facility.<\/p>\n\n\n\n<p>The AMF is supported by a research associate, a graduate student assistant, and a facilities coordinator to assist all users in use of and training on the AMF equipment. Collaboration of UCF researchers with other universities, government agencies, and industrial companies is strongly encouraged.<\/p>\n<\/div>\n\n\n\n<div class=\"wp-block-column is-layout-flow wp-block-column-is-layout-flow\" style=\"flex-basis:33.33%\">\n<figure class=\"wp-block-image size-full\"><a href=\"https:\/\/nanoscience.ucf.edu\/wp-content\/uploads\/sites\/15\/2023\/03\/plasmaasher.jpg\"><img loading=\"lazy\" decoding=\"async\" width=\"400\" height=\"373\" src=\"https:\/\/nanoscience.ucf.edu\/wp-content\/uploads\/sites\/15\/2023\/03\/plasmaasher.jpg\" alt=\"\" class=\"wp-image-466\" srcset=\"https:\/\/nanoscience.ucf.edu\/chanda\/wp-content\/uploads\/sites\/15\/2023\/03\/plasmaasher.jpg 400w, https:\/\/nanoscience.ucf.edu\/chanda\/wp-content\/uploads\/sites\/15\/2023\/03\/plasmaasher-300x280.jpg 300w\" sizes=\"auto, (max-width: 400px) 100vw, 400px\" \/><\/a><\/figure>\n<\/div>\n<\/div>\n\n\n\n<div class=\"wp-block-columns is-layout-flex wp-container-core-columns-is-layout-9d6595d7 wp-block-columns-is-layout-flex\">\n<div class=\"wp-block-column is-layout-flow wp-block-column-is-layout-flow\" style=\"flex-basis:66.66%\">\n<h3 class=\"wp-block-heading\">Available Equipment\/Techniques<\/h3>\n\n\n\n<h4 class=\"wp-block-heading\"><em>Lithographic Processing<\/em><\/h4>\n\n\n\n<ul class=\"wp-block-list\">\n<li>Pattern Generator<\/li>\n\n\n\n<li>EVG 620 Dual sided mask aligner<\/li>\n\n\n\n<li><a href=\"https:\/\/www.nanoscience.ucf.edu\/chanda\/images\/equipment\/plasmaasher.jpg\" target=\"_blank\" rel=\"noreferrer noopener\">AutoGlow Plasma Asher<\/a><\/li>\n\n\n\n<li>LFE Barrel Asher<\/li>\n\n\n\n<li>Nanonex NEX2500 Nano-Imprinter<\/li>\n\n\n\n<li>Quintel Mask Aligner<\/li>\n\n\n\n<li>Tamarak Contact Printer<\/li>\n\n\n\n<li>MJB -3 Mask Aligners<\/li>\n\n\n\n<li><a href=\"https:\/\/www.nanoscience.ucf.edu\/chanda\/images\/equipment\/maskaligner.jpg\" target=\"_blank\" rel=\"noreferrer noopener\">EVG 620 Dual Sided Mask Aligner<\/a><\/li>\n<\/ul>\n\n\n\n<h4 class=\"wp-block-heading\"><em>Thin Film Processing<\/em><\/h4>\n\n\n\n<ul class=\"wp-block-list\">\n<li>AJA Six-Gun Sputtering System<\/li>\n\n\n\n<li>AJA Three-Gun Sputtering System<\/li>\n\n\n\n<li>AJA 2-Gun, 10 Pocket E-Beam System with Ion-Assist Source<\/li>\n\n\n\n<li>CHA E-Beam Evaporation<\/li>\n\n\n\n<li>EVG 510 Wafer Bonder<\/li>\n\n\n\n<li>Plasma Technology &#8211; RIE<\/li>\n\n\n\n<li>Edwards Filament Evaporator<\/li>\n\n\n\n<li>Cryo Filament Evaporation<\/li>\n\n\n\n<li>Cryo Small Single Sputtering<\/li>\n<\/ul>\n<\/div>\n\n\n\n<div class=\"wp-block-column is-layout-flow wp-block-column-is-layout-flow\" style=\"flex-basis:33.33%\">\n<figure class=\"wp-block-image size-full\"><a href=\"https:\/\/nanoscience.ucf.edu\/wp-content\/uploads\/sites\/15\/2023\/03\/maskaligner.jpg\"><img loading=\"lazy\" decoding=\"async\" width=\"225\" height=\"241\" src=\"https:\/\/nanoscience.ucf.edu\/wp-content\/uploads\/sites\/15\/2023\/03\/maskaligner.jpg\" alt=\"\" class=\"wp-image-465\"\/><\/a><\/figure>\n<\/div>\n<\/div>\n<\/div>\n<\/div>\n","protected":false},"excerpt":{"rendered":"Advanced Microfabrication Facility The Advanced Microfabrication Facility (AMF) is a multi-user cleanroom facility dedicated to provide university researchers and industrial and government partners the capabilities to perform cutting edge research, and training and education of students in the use of the available equipment for fabrication and testing of microdevices. AMF consists if a 600 sq.&hellip;","protected":false},"author":69,"featured_media":0,"parent":68,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":{"_acf_changed":false,"footnotes":""},"class_list":["post-437","page","type-page","status-publish","hentry"],"yoast_head":"<!-- This site is optimized with the Yoast SEO Premium plugin v23.0 (Yoast SEO v27.1.1) - https:\/\/yoast.com\/product\/yoast-seo-premium-wordpress\/ -->\n<title>Advanced Microfabrication Facility - Nano-Optics Group<\/title>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/nanoscience.ucf.edu\/chanda\/resources\/advanced-microfabrication-facility\/\" \/>\n<meta property=\"og:locale\" content=\"en_US\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"Advanced Microfabrication Facility - Nano-Optics Group\" \/>\n<meta property=\"og:description\" content=\"Advanced Microfabrication Facility The Advanced Microfabrication Facility (AMF) is a multi-user cleanroom facility dedicated to provide university researchers and industrial and government partners the capabilities to perform cutting edge research, and training and education of students in the use of the available equipment for fabrication and testing of microdevices. AMF consists if a 600 sq.&hellip;\" \/>\n<meta property=\"og:url\" content=\"https:\/\/nanoscience.ucf.edu\/chanda\/resources\/advanced-microfabrication-facility\/\" \/>\n<meta property=\"og:site_name\" content=\"Nano-Optics Group\" \/>\n<meta property=\"article:modified_time\" content=\"2023-03-30T15:00:15+00:00\" \/>\n<meta property=\"og:image\" content=\"https:\/\/gritcms.smca.ucf.edu\/wp-content\/uploads\/sites\/15\/2023\/03\/plasmaasher.jpg\" \/>\n<meta name=\"twitter:card\" content=\"summary_large_image\" \/>\n<meta name=\"twitter:label1\" content=\"Est. reading time\" \/>\n\t<meta name=\"twitter:data1\" content=\"1 minute\" \/>\n<script type=\"application\/ld+json\" class=\"yoast-schema-graph\">{\"@context\":\"https:\/\/schema.org\",\"@graph\":[{\"@type\":\"WebPage\",\"@id\":\"https:\/\/nanoscience.ucf.edu\/chanda\/resources\/advanced-microfabrication-facility\/\",\"url\":\"https:\/\/nanoscience.ucf.edu\/chanda\/resources\/advanced-microfabrication-facility\/\",\"name\":\"Advanced Microfabrication Facility - Nano-Optics Group\",\"isPartOf\":{\"@id\":\"https:\/\/nanoscience.ucf.edu\/chanda\/#website\"},\"primaryImageOfPage\":{\"@id\":\"https:\/\/nanoscience.ucf.edu\/chanda\/resources\/advanced-microfabrication-facility\/#primaryimage\"},\"image\":{\"@id\":\"https:\/\/nanoscience.ucf.edu\/chanda\/resources\/advanced-microfabrication-facility\/#primaryimage\"},\"thumbnailUrl\":\"https:\/\/nanoscience.ucf.edu\/wp-content\/uploads\/sites\/15\/2023\/03\/plasmaasher.jpg\",\"datePublished\":\"2023-03-23T17:06:41+00:00\",\"dateModified\":\"2023-03-30T15:00:15+00:00\",\"breadcrumb\":{\"@id\":\"https:\/\/nanoscience.ucf.edu\/chanda\/resources\/advanced-microfabrication-facility\/#breadcrumb\"},\"inLanguage\":\"en-US\",\"potentialAction\":[{\"@type\":\"ReadAction\",\"target\":[\"https:\/\/nanoscience.ucf.edu\/chanda\/resources\/advanced-microfabrication-facility\/\"]}]},{\"@type\":\"ImageObject\",\"inLanguage\":\"en-US\",\"@id\":\"https:\/\/nanoscience.ucf.edu\/chanda\/resources\/advanced-microfabrication-facility\/#primaryimage\",\"url\":\"https:\/\/nanoscience.ucf.edu\/wp-content\/uploads\/sites\/15\/2023\/03\/plasmaasher.jpg\",\"contentUrl\":\"https:\/\/nanoscience.ucf.edu\/wp-content\/uploads\/sites\/15\/2023\/03\/plasmaasher.jpg\"},{\"@type\":\"BreadcrumbList\",\"@id\":\"https:\/\/nanoscience.ucf.edu\/chanda\/resources\/advanced-microfabrication-facility\/#breadcrumb\",\"itemListElement\":[{\"@type\":\"ListItem\",\"position\":1,\"name\":\"Resources\",\"item\":\"https:\/\/nanoscience.ucf.edu\/chanda\/resources\/\"},{\"@type\":\"ListItem\",\"position\":2,\"name\":\"Advanced Microfabrication Facility\"}]},{\"@type\":\"WebSite\",\"@id\":\"https:\/\/nanoscience.ucf.edu\/chanda\/#website\",\"url\":\"https:\/\/nanoscience.ucf.edu\/chanda\/\",\"name\":\"Nano-Optics Group\",\"description\":\"\",\"potentialAction\":[{\"@type\":\"SearchAction\",\"target\":{\"@type\":\"EntryPoint\",\"urlTemplate\":\"https:\/\/nanoscience.ucf.edu\/chanda\/?s={search_term_string}\"},\"query-input\":{\"@type\":\"PropertyValueSpecification\",\"valueRequired\":true,\"valueName\":\"search_term_string\"}}],\"inLanguage\":\"en-US\"}]}<\/script>\n<!-- \/ Yoast SEO Premium plugin. -->","yoast_head_json":{"title":"Advanced Microfabrication Facility - Nano-Optics Group","robots":{"index":"index","follow":"follow","max-snippet":"max-snippet:-1","max-image-preview":"max-image-preview:large","max-video-preview":"max-video-preview:-1"},"canonical":"https:\/\/nanoscience.ucf.edu\/chanda\/resources\/advanced-microfabrication-facility\/","og_locale":"en_US","og_type":"article","og_title":"Advanced Microfabrication Facility - Nano-Optics Group","og_description":"Advanced Microfabrication Facility The Advanced Microfabrication Facility (AMF) is a multi-user cleanroom facility dedicated to provide university researchers and industrial and government partners the capabilities to perform cutting edge research, and training and education of students in the use of the available equipment for fabrication and testing of microdevices. AMF consists if a 600 sq.&hellip;","og_url":"https:\/\/nanoscience.ucf.edu\/chanda\/resources\/advanced-microfabrication-facility\/","og_site_name":"Nano-Optics Group","article_modified_time":"2023-03-30T15:00:15+00:00","og_image":[{"url":"https:\/\/gritcms.smca.ucf.edu\/wp-content\/uploads\/sites\/15\/2023\/03\/plasmaasher.jpg","type":"","width":"","height":""}],"twitter_card":"summary_large_image","twitter_misc":{"Est. reading time":"1 minute"},"schema":{"@context":"https:\/\/schema.org","@graph":[{"@type":"WebPage","@id":"https:\/\/nanoscience.ucf.edu\/chanda\/resources\/advanced-microfabrication-facility\/","url":"https:\/\/nanoscience.ucf.edu\/chanda\/resources\/advanced-microfabrication-facility\/","name":"Advanced Microfabrication Facility - Nano-Optics Group","isPartOf":{"@id":"https:\/\/nanoscience.ucf.edu\/chanda\/#website"},"primaryImageOfPage":{"@id":"https:\/\/nanoscience.ucf.edu\/chanda\/resources\/advanced-microfabrication-facility\/#primaryimage"},"image":{"@id":"https:\/\/nanoscience.ucf.edu\/chanda\/resources\/advanced-microfabrication-facility\/#primaryimage"},"thumbnailUrl":"https:\/\/nanoscience.ucf.edu\/wp-content\/uploads\/sites\/15\/2023\/03\/plasmaasher.jpg","datePublished":"2023-03-23T17:06:41+00:00","dateModified":"2023-03-30T15:00:15+00:00","breadcrumb":{"@id":"https:\/\/nanoscience.ucf.edu\/chanda\/resources\/advanced-microfabrication-facility\/#breadcrumb"},"inLanguage":"en-US","potentialAction":[{"@type":"ReadAction","target":["https:\/\/nanoscience.ucf.edu\/chanda\/resources\/advanced-microfabrication-facility\/"]}]},{"@type":"ImageObject","inLanguage":"en-US","@id":"https:\/\/nanoscience.ucf.edu\/chanda\/resources\/advanced-microfabrication-facility\/#primaryimage","url":"https:\/\/nanoscience.ucf.edu\/wp-content\/uploads\/sites\/15\/2023\/03\/plasmaasher.jpg","contentUrl":"https:\/\/nanoscience.ucf.edu\/wp-content\/uploads\/sites\/15\/2023\/03\/plasmaasher.jpg"},{"@type":"BreadcrumbList","@id":"https:\/\/nanoscience.ucf.edu\/chanda\/resources\/advanced-microfabrication-facility\/#breadcrumb","itemListElement":[{"@type":"ListItem","position":1,"name":"Resources","item":"https:\/\/nanoscience.ucf.edu\/chanda\/resources\/"},{"@type":"ListItem","position":2,"name":"Advanced Microfabrication Facility"}]},{"@type":"WebSite","@id":"https:\/\/nanoscience.ucf.edu\/chanda\/#website","url":"https:\/\/nanoscience.ucf.edu\/chanda\/","name":"Nano-Optics Group","description":"","potentialAction":[{"@type":"SearchAction","target":{"@type":"EntryPoint","urlTemplate":"https:\/\/nanoscience.ucf.edu\/chanda\/?s={search_term_string}"},"query-input":{"@type":"PropertyValueSpecification","valueRequired":true,"valueName":"search_term_string"}}],"inLanguage":"en-US"}]}},"acf":[],"_links":{"self":[{"href":"https:\/\/nanoscience.ucf.edu\/chanda\/wp-json\/wp\/v2\/pages\/437","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/nanoscience.ucf.edu\/chanda\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/nanoscience.ucf.edu\/chanda\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/nanoscience.ucf.edu\/chanda\/wp-json\/wp\/v2\/users\/69"}],"replies":[{"embeddable":true,"href":"https:\/\/nanoscience.ucf.edu\/chanda\/wp-json\/wp\/v2\/comments?post=437"}],"version-history":[{"count":0,"href":"https:\/\/nanoscience.ucf.edu\/chanda\/wp-json\/wp\/v2\/pages\/437\/revisions"}],"up":[{"embeddable":true,"href":"https:\/\/nanoscience.ucf.edu\/chanda\/wp-json\/wp\/v2\/pages\/68"}],"wp:attachment":[{"href":"https:\/\/nanoscience.ucf.edu\/chanda\/wp-json\/wp\/v2\/media?parent=437"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}