The 3D surface profiler VK-X3000 series offers both magnified observation and shape measurements with display resolution in height [z] (measurement range of 7 mm) and width [x/y] measurements up to 1 nm. It also possesses a measuring microscope that can analyze samples to quantify shape and roughness. The instrument employs two light sources: a short-wavelength laser source and a white light source. These two types of light sources enable acquisition of both laser intensity and color images, enabling the capture of fully focused and height/color map images. Film thickness measurements can be achieved from 80 μm (10x magnification) up to 3.5 μm (50x magnification) for transparent targets.
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