The AJA Electron Beam Evaporation System is an ATC-Orion-8E UHV system with 5 Pocket Linear E Beam Source on convenient slide mechanism for loading and service; it also features turbo-pumped vacuum load-lock. Contact the faculty in charge of this instrument (see "Instrument User Policy and Instrument List") for additional information.
Reserve equipment
Click the link below to go to the equipment reservation page.