Thin Film Deposition System – Thermionics E-beam & RDM Thermal Evaporator

The Thermionics e- beam evaporator applies intense electron beam to vaporize source material under high vacuum for deposition onto a desired substrate. It features 4 pockets for use with crucible liner size 7 cc. The RDM thermal evaporator applies low voltage (high amperage) for the vaporization process. There are 2 sources for use with boat size of 1 7/8 inch. The deposition system is a manual deposition up to 10-7 torr. Approved source materials for deposition are Au, Cr, Pd, Ni, Cu, Ti, Pt, Ag, In, Al, SiO2, Mo, and W – note that not all materials approved for the chamber will thermally evaporate due to high melting temperature.